7 results
Tm-Er Codoping Al2O3 Thin Films: Activation by Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 866 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, V5.6/FF5.6
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- 2005
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Study of poly-Si/TaSiN/Pt structure for stacked capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 748 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, U1.6
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- 2002
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Oxygen transport during annealing of Pb(Zr,Ti)O3 thin films in O2 gas and its effect on their conductivity
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 10 / October 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 3005-3008
- Print publication:
- October 2001
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18O study of the oxidation of reactively sputtered Ti1−xAlxN barrier
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 9 / September 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2591-2599
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- September 2001
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Oxidation Resistance of TaSiN Diffusion Barriers for Stacked Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 655 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, CC2.2.1
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- 2000
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Narrow Resonance Profiling Study of the Oxidation of Ti1-xALxN Barrier Layer
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- Journal:
- MRS Online Proceedings Library Archive / Volume 596 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 97
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- 1999
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Effect of Annealing Treatment on PZT Thin Fiilm Properties Using Oxygen 18 Depth Profiling Technique
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- Journal:
- MRS Online Proceedings Library Archive / Volume 541 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 393
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- 1998
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